Uphill diffusion of Si-interstitial during boron diffusion in silicon ...
1. In the near surface area (x = 0.0 ÷ 0.5 µm), D IB is negative and diffusion flux J I goes to the area of higher boron concentration. It means Si-interstitial diffuses uphill; 2. In the far surface area (x = 0.5 ÷ 1.0 µm), D IB is positive and diffusion flux J I goes to the area of lower boron concentration. It means Si-interstitial diffuses downhill (normal diffusion).