On-Chip Inductors with Self-Rolled-Up SiN Nanomembrane …
KEYWORDS: self-rolled-up, nanomembrane, on-chip inductor, SiN x tube O n-chip inductors have widespread applications in radio frequency integrated circuits (RFICs). Planar spiral inductor is the most commonly used on-chip inductor in current RFIC designs due to its easy fabrication with standard CMOS processes, which, at the same time, limits ...